Nano-sculptured vanadium oxide thin films for benzene detection
Résumé
DC magnetron sputtering was used to prepare nano-sculptured vanadium oxide thin films and their gas sensing properties were investigated for the detection of benzene traces in the air. Oblique nano-structures showed excellent responses to benzene, as well as good repeatability and stability, which makes it a very reliable sensor for the detection of very low concentrations of benzene (a few ten ppbs) in air and under realistic conditions of humidity, as high as 60 % RH at 25 °C.
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